Base-Catalyzed Photosensitive Polyimide
- 著者名:
McKean, D. R. Wallraff, G. M. Volksen, W. Hacker, N. P. Sanchez, M. I. Labadie, J. W. - 掲載資料名:
- Polymers for microelectronics : resists and dielectrics
- シリーズ名:
- ACS symposium series
- シリーズ巻号:
- 537
- 発行年:
- 1994
- 開始ページ:
- 417
- 出版情報:
- Washington, DC: American Chemical Society
- ISSN:
- 00976156
- ISBN:
- 9780841227217 [0841227217]
- 言語:
- 英語
- 請求記号:
- A05800/537
- 資料種別:
- 国際会議録
類似資料:
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2
国際会議録
Structure-Dielectric Property Relationships of Thin Polyimide Films with Nano-Foam Morphology
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