Blank Cover Image

CHEMICAL OXIDE PASSIVATION FOR VERY THIN OXIDE FORMATION

著者名:
掲載資料名:
Surface chemical cleaning and passivation for semiconductor processing
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
315
発行年:
1993
開始ページ:
381
出版情報:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992139 [1558992138]
言語:
英語
請求記号:
M23500/315
資料種別:
国際会議録

類似資料:

Nakamura, K., Futatsuki, T., Makihara, K., Ohmi, T.

Electrochemical Society

Nakagawa, Y., Aomi, H., Takano, J., Ohmi, T.

Electrochemical Society

Iwamoto, T., Takano, J., Makihara, K., Ohmi, T.

MRS - Materials Research Society

J. Rusnák, M. Ružinský, K. Imamura, T. Matsumoto, M. Štefečka

Trans Tech Publications

M. Morita, K. Nakamura, A. Teramoto, K. Makihara, T. Ohmi

Electrochemical Society

Saito, Y., Sekine, K., Hirayama, M., Ohmi, T.

Electrochemical Society

Ohmi, T., Okada, Y., Yabune, T., Ohmi, K.

Electrochemical Society

Ohmi, T.

Electrochemical Society

T. Ohmi, K. Matsumoto, K. Nakamura

Electrochemical Society

Morita, H., Joo, J.-D., Messoussi, R., Kawada, K., Kim, J.-S., Ohmi, T.

Electrochemical Society

Kaihara, R., Hirayama, M., Ohmi, T.

Electrochemical Society

Ohdomari, I., Konuma, K., Takano, M., Chikyow, T., Kawarada, H., Nakanishi, J., Ueno, T.

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12