HF-IMMERSION INDUCTIVELY COUPLED CARRIER LIFETIME CHARACTERIZATION OF FURNACE-OXIDE GROWTH
- 著者名:
Boone, T. Higashi, G. S. Benton, J. L. Kistler, R. C. Weber, G. R. Keller, R. C. Makris, G. - 掲載資料名:
- Surface chemical cleaning and passivation for semiconductor processing
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 315
- 発行年:
- 1993
- 開始ページ:
- 359
- 出版情報:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992139 [1558992138]
- 言語:
- 英語
- 請求記号:
- M23500/315
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
MRS - Materials Research Society | |
Electrochemical Society |
10
国際会議録
Manufacturing multilevel metal CMOS with deuterium anneals for improved hot-carrier reliablility
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
Trans Tech Publications |
Electrochemical Society |