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DRY HYDROGEN PLASMA CLEANING FOR LOCAL EPITAXIAL GROWTH

著者名:
Ramm, Juergen
Beck, Eugen
Eisele, Ignaz
Hansch, Walter
Klepser, Bernd-Ulrich
Senn, Hans
さらに 1 件
掲載資料名:
Surface chemical cleaning and passivation for semiconductor processing
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
315
発行年:
1993
開始ページ:
91
出版情報:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992139 [1558992138]
言語:
英語
請求記号:
M23500/315
資料種別:
国際会議録

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