Atomic Force Microscope-Based Lithography of Titanium
- 著者名:
Gordon, A. E. Litfin, D. D. Hagedorn, M. S. Chen, J. Fayfield, R. T. Higman, T. K. - 掲載資料名:
- Materials - fabrication and patterning at the nanoscale : Symposium held April 19-20, 1995, San Francisco, California, USA
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 380
- 発行年:
- 1995
- 開始ページ:
- 125
- 出版情報:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992832 [1558992839]
- 言語:
- 英語
- 請求記号:
- M23500/380
- 資料種別:
- 国際会議録
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