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In Situ Fourier Transform Infrared Spectroscopy for Real-Time Diagnostics of Thin-Film Processes

著者名:
Solomon, P. R.
Charpenay, S.
Zhang, W.
Bonanno, A. S.
Rosenthal, P. A.
Cosgrove, J. E.
Kinsella, K. K.
Kung, P. J.
さらに 3 件
掲載資料名:
In situ process diagnostics and intelligent materials processing : symposium held December 2-5, 1997, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
502
発行年:
1998
開始ページ:
15
出版情報:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994072 [1558994076]
言語:
英語
請求記号:
M23500/502
資料種別:
国際会議録

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