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Real-Time Monitoring of Semiconductor Growth by Spectroscopic Ellipsometry

著者名:
Johs, B.
Hale, J.
Herzinger, C.
Doctor, D.
Elliott, K.
Olson, G.
Chow, D.
Roth, J.
Ferguson, I.
Pelczynski, M.
Kuo, C. H.
Johnson, S.
さらに 7 件
掲載資料名:
In situ process diagnostics and intelligent materials processing : symposium held December 2-5, 1997, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
502
発行年:
1998
開始ページ:
3
出版情報:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994072 [1558994076]
言語:
英語
請求記号:
M23500/502
資料種別:
国際会議録

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