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Orientation Characteristics With Process Parameters of PLZT(X/0/100) Thin Films Prepared by rf-Magnetron Sputtering

著者名:
掲載資料名:
Polycrystalline thin films : structure, texture, properties and applications III : symposium held March 31-April 3, 1997, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
472
発行年:
1997
開始ページ:
385
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993761 [1558993762]
言語:
英語
請求記号:
M23500/472
資料種別:
国際会議録

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