In-Plane Crystallographic Texture of bcc Metal Thin Films on Amorphous Substrates

In-Plane Crystallographic Texture of bcc Metal Thin Films on Amorphous Substrates

著者名:

掲載資料名:

Polycrystalline thin films : structure, texture, properties and applications III : symposium held March 31-April 3, 1997, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

472

発行年:

1997

開始ページ:

27

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993761 [1558993762]

言語:

英語

請求記号:

M23500/472

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017993
シリーズID:	PA00000011
会議名:	Polycrystalline thin films-structure, texture, properties and applications
回次:	3rd
会議開催地:	San Francisco, California, U.S.A.
会議開催年:	1997.03.31-1997.04.03

類似資料:

1 国際会議録 Film Crystallographic Texture and Substrate Surface Roughness in Layered Aluminum Metallization Rodbell, K. P., Svilan, V., Gignac, L. M., DeHaven, P. W., Murphy, R. J., Licata, T. J. MRS - Materials Research Society	7 国際会議録 Mechanisms for Microstructure Evolution in Electroplated Copper Thin Films Harper, J. M. E., Cabral, C., Jr., Andricacos, P. C., Gignac, L., Noyan, I. C., Rodbell, K. P., Hu, C. K. MRS - Materials Research Society
2 国際会議録 THE EFFECT OF ANNEALING ON THE Cu DISTRIBUTION AND Al2Cu PRECIPITATION IN Al(Cu) THIN FILMS Colgan, E. G., Rodbell, K. P., Vigliotti, D. R. MRS - Materials Research Society	8 国際会議録 Growth and Characterization of Amorphous AIN Thin Films by Reactive Magnetron Sputtering at Low Temperature Gurumurugan, K., Chen, H., Harp, G. R. MRS - Materials Research Society
3 国際会議録 Growth and Structure of In-Plane Textured MgO Thin Films Deposited on Amorphous Substrates Using Ion-Beam-Assisted E-Beam Evaporation Wang, Connie P., Do, Khiem B., Marshall, Ann F., Geballe, Theodore H., Beasley, Malcolm R., Hammond, Robert H. MRS - Materials Research Society	9 国際会議録 RAPID EVALUATION OF THIN FILM INTERFACIAL REACTIONS USING TEMPERATURE-RAMPED MEASUREMENTS Harper, J. M. E., Clevenger, L. A., Colgan, E. G., Cabral, C., Jr., Arcot, B. MRS - Materials Research Society
4 国際会議録 Dependence of Crystallographic Texture of C54 TiSi2 on Thickness and Linewidth in Submicron CMOS Structures Svilan, V., Rodbell, K. P., Clevenger, L. A., Cabral, C., Jr., Roy, R. A., Lavoie, C., Jordan-Sweet, J., Harper, J. M. … MRS - Materials Research Society	10 国際会議録 Crystallographic Texture And Phase Metrology During Damascene Copper Processing Kozaczek, K.J., DeHaven, P.W., Rodbell, K.P., Malhotra, S., Kurtz, D.S., Martin, R.I., Moran, P.R. Materials Research Society
5 国際会議録 Crystallographic Texture and Phase Formation in Blanket Ti/TiN/AlCu Films DeHaven, P. W., Clevenger, L. A., Schnabe, R. F., Weber, S. J., Iggulden, R. C., Rodbell, K. P. MRS - Materials Research Society	11 国際会議録 Scattering, Diffraction, and Geometric Light Trapping in Thin-Film Amorphous Silicon Solar Cells on Plastic Substrates M.M. de Jong, J. Baggerman, C.J.M. van Rijn, P.J. Sonneveld, G.L.A.M. Swinkels, H.J. Holterman, J.K. Rath, R.E.I. … Materials Research Society
6 国際会議録 MANUFACTURABILITY VERSUS RELIABILITY ISSUES RELEVANT TO INTERCONNECT METALLIZATIONS Rodbell, K. P., Colgan, E. G., Hu, C-K. MRS - Materials Research Society	12 国際会議録 Mechanisms for Microstructure Evolution in Electroplated Copper Thin Films Cabral, C., Gignac, L., Harper, J. N. E., Hu, C. K., Noyan, I. C., ricacos, P. C., Rodbell, K. P. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12