Thermal Stability of Cu Films on TiN/Ti/Si(100) by Partially Ionized Beam Deposition
- 著者名:
Jang, H. G. Kim, K. H. Choi, D. J. Han, S. Choi, S. C. Choi, W. K. Jung, H-J. Koh, S. K. - 掲載資料名:
- Microstructure evolution during irradiation : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 439
- 発行年:
- 1997
- 開始ページ:
- 257
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993433 [1558993436]
- 言語:
- 英語
- 請求記号:
- M23500/439
- 資料種別:
- 国際会議録
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