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Hydrogen Release and Si-N Bond-Healing Infrared Study of Rapid Thermal Annealed Amorphous Silicon Nitride Thin Films

著者名:
掲載資料名:
Thermodynamics and kinetics of phase transformations : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
398
発行年:
1996
開始ページ:
345
出版情報:
Pittsburgh, Penn.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993013 [1558993010]
言語:
英語
請求記号:
M23500/398
資料種別:
国際会議録

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