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THE INFLUENCE OF TEMPERATURE GRADIENTS ON PARTIAL PRESSURES IN A CVD REACTOR

著者名:
Oosterlaken, T. G. M.
Leusink, G. J.
Janssen, G. C. A. M.
Radelaar, S.
Kuijlaars, K. J.
Kleijn, C. R.
Akker, H. E. A. Van Den
さらに 2 件
掲載資料名:
Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
334
発行年:
1994
開始ページ:
483
出版情報:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992337 [1558992332]
言語:
英語
請求記号:
M23500/334
資料種別:
国際会議録

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