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ECR PLASMA ENHANCED MOCVD OF TITANIUM NITRIDE

著者名:
Gross, M. E.
Weber, A.
Nikulski, R.
Klages, C. -P.
Charatan, R. M.
Brown, W. L.
Dons, E.
Eaglesham, D. J.
さらに 3 件
掲載資料名:
Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
334
発行年:
1994
開始ページ:
323
出版情報:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992337 [1558992332]
言語:
英語
請求記号:
M23500/334
資料種別:
国際会議録

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