Enhanced hydrogenation in polycrystalline Si thin films using ultrasound treatment
- 著者名:
- Ostapenko,S. ( Univ.of South Florida )
- Koshka,Y.
- Jastrzebski,L.
- Smeltzer,R.K.
- 掲載資料名:
- Active matrix liquid crystal displays technology and applications : 10-11 February, 1997, San Jose, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3014
- 発行年:
- 1997
- 開始ページ:
- 176
- 終了ページ:
- 183
- 出版情報:
- Bellingham, Washington: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819424259 [0819424250]
- 言語:
- 英語
- 請求記号:
- P63600/3014
- 資料種別:
- 国際会議録
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4
国際会議録
Mechanism of ultrasonic enhanced hydrogenation in poly-Si thin films using ultrasound treatment
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