Characteristics of excimer-laser-annealed polysilicon films for application in polysilicon thin film transistor devices
- 著者名:
- Voutsas,T. ( Sharp Microelectronics Technology,Inc. )
- Marmorstein,A.
- Solanki,R.
- 掲載資料名:
- Active matrix liquid crystal displays technology and applications : 10-11 February, 1997, San Jose, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3014
- 発行年:
- 1997
- 開始ページ:
- 112
- 終了ページ:
- 118
- 出版情報:
- Bellingham, Washington: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819424259 [0819424250]
- 言語:
- 英語
- 請求記号:
- P63600/3014
- 資料種別:
- 国際会議録
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