Blank Cover Image

Optical properties of ion-implanted laser-annealed Si studied by spectroscopic ellipsometry

著者名:
掲載資料名:
International Symposium on Polarization Analysis and Applications to Device Technology
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2873
発行年:
1996
開始ページ:
258
終了ページ:
261
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422712 [0819422711]
言語:
英語
請求記号:
P63600/2873
資料種別:
国際会議録

類似資料:

1 国際会議録 Investigation of anisotropic effect on the optical properties of InxGa1-xP using spectroscopic ellipsometry

Watanabe,K., Saitoh,T., Xiong,Y.-M.

SPIE-The International Society for Optical Engineering
7 国際会議録 Excimer Laser Annealing of Ion-Implanted 6H-Silicon Carbide

Hishida, Y., Watanabe, M., Nakashima, K., Eryu, O.

Trans Tech Publications
2 国際会議録 Optical properties of sol-gel Ba0.7Sr0.3TiO3 thin films studied by spectroscopic ellipsometry

Suzuki,I., Miyazaki,M., Saitoh,T., Xiong,Y.-M.

SPIE-The International Society for Optical Engineering
8 国際会議録 Characterization of modulation-doped n-AlxGa1-xAs/GaAs heterostructure using spectroscopic ellipsometry and photoreflectance

Wong,C.C., Mochizuki,M., Yaguchi,H., Saitoh,T., Xiong,Y.-M.

SPIE-The International Society for Optical Engineering
3 国際会議録 Optical and Electrical Properties of Laser Crystallized Silicon Films

Sameshima, T., Takashima, N., Saitoh, K., Betsuda, N.

Electrochemical Society
9 国際会議録 STUDY OF ION IMPLANTED COPPER LASER MIRRORS BY SPECTROSCOPIC ELLIPSOMETRY

Snyder, P.G., Massengale, A., Memarzadeh, K., Woollam, J.A., Ingram, D.C., Pronko, P.P.

Materials Research Society
4 国際会議録 In Situ Observation of UV/Ozone Oxidation of Silicon Using Spectroscopic Ellipsometry

Saitoh, T., Kobayashi, D., Kimura, D., Asai, K.

MRS - Materials Research Society
10 国際会議録 Luminescent Nanometer-Sized Si Crystals Formed in an Amorphous Silicon Dioxide Matrix by Ion Implantation and Annealing

Iwayama, T. S., Terao, Y., Kamiya, A., Takeda, M., Nakao, S., Saitoh, K.

MRS - Materials Research Society
5 国際会議録 Optical properties of liquid metals studied by spectroscopic ellipsometry

Krishnan,S., Yugawa,K.J., Nordine,P.C.

SPIE-The International Society for Optical Engineering
11 国際会議録 Formation of Deep pn Junctions by MeV Al- and B-Ion Implantations into 4H-SiC and Reverse Characteristics

Miyamoto, N., Saitoh, A., Kimoto, T., Matsunami, H., Hishida, Y., Watanabe, M.

Trans Tech Publications
6 国際会議録 Ion Implantation Induced Damage Accumulation Studied by Rutherford Backscattering Spectrometry and Spectroscopic Ellipsometry

Lohner,T., Khanh,N.Q., Petrik,P., Gyulai,M FriedE.KotaiJ.

Trans Tech Publications
12 国際会議録 PMMA and polystyrene films modification under ion implantation studied by spectroscopic ellipsometry

Leontyev, A.V., Kovalev, V.I., Khomich, A.V., Komarov, F.F., Grigoryev, V.V., Kamishan, A.S.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12