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First thin film ellipsometry at a photon energy of 97eV using high-performance multilayer polarizers

著者名:
掲載資料名:
International Symposium on Polarization Analysis and Applications to Device Technology
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2873
発行年:
1996
開始ページ:
70
終了ページ:
73
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422712 [0819422711]
言語:
英語
請求記号:
P63600/2873
資料種別:
国際会議録

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