Assembly and interconnection technologies for electrical and optical microsystems
- 著者名:
Muller-Fiedler,R. ( Robert Bosch GmbH ) Dutzi,J. Moss,E. Kuttner,K. Kummer,N. Gundlach,M. - 掲載資料名:
- Micro-optical technologies for measurement, sensors, and microsystems : 12-13 June 1996, Besançon, France
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2783
- 発行年:
- 1996
- 開始ページ:
- 88
- 終了ページ:
- 97
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819421692 [0819421693]
- 言語:
- 英語
- 請求記号:
- P63600/2783
- 資料種別:
- 国際会議録
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