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The adsorption of iodine at GaAs (100) surfaces via the decomposition of CH2I2: a model study of semiconductor etching

著者名:
掲載資料名:
Structure and reactivity of surfaces : proceedings of a European conference, Trieste, Italy, September 13-16, 1988
シリーズ名:
Studies in surface science and catalysis
シリーズ巻号:
48
発行年:
1989
開始ページ:
229
出版情報:
Amsterdam: Elsevier
ISSN:
01672991
ISBN:
9780444874658 [0444874658]
言語:
英語
請求記号:
S76950
資料種別:
国際会議録

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