Characterization of BN Thin Films Deposited by Plasma CVD

Characterization of BN Thin Films Deposited by Plasma CVD

著者名:

Osaka,Y.

掲載資料名:

Synthesis and properties of boron nitride

シリーズ名:

Materials science forum

シリーズ巻号:

54-55

発行年:

1990

開始ページ:

277

終了ページ:

294

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878496068 [0878496068]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017896
シリーズID:	PA00000012

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