Improved polysilicon surface-micromachined micromirror devices using chemical-mechanical polishing
- 著者名:
- Hetherington, Dale L. ( Sandia National Laboratories )
- Sniegowski, Jeffry J.
- 掲載資料名:
- Photonics for space environments VI : 22 July 1998, San Diego, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3440
- 発行年:
- 1998
- 開始ページ:
- 148
- 終了ページ:
- 153
- 出版情報:
- Bellingham, Wash.: SPIE
- ISSN:
- 0277786X
- ISBN:
- 9780819428950 [0819428957]
- 言語:
- 英語
- 請求記号:
- P63600/3440
- 資料種別:
- 国際会議録
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