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Improved polysilicon surface-micromachined micromirror devices using chemical-mechanical polishing

著者名:
掲載資料名:
Photonics for space environments VI : 22 July 1998, San Diego, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3440
発行年:
1998
開始ページ:
148
終了ページ:
153
出版情報:
Bellingham, Wash.: SPIE
ISSN:
0277786X
ISBN:
9780819428950 [0819428957]
言語:
英語
請求記号:
P63600/3440
資料種別:
国際会議録

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