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Model-based control of chemical mechanical polishing

著者名:
Toprac,A.J. ( Advanced Micro Devices,Inc. )  
掲載資料名:
Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3213
発行年:
1997
開始ページ:
101
終了ページ:
107
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426451 [0819426458]
言語:
英語
請求記号:
P63600/3213
資料種別:
国際会議録

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