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Ultraprecision microelectroforming of metals and metal alloys

著者名:
  • Lowe,H. ( Institut fur Mikrotechnik Mainz GmbH (FRG) )
  • Ehrfeld,W. ( Institut fur Mikrotechnik Mainz GmbH (FRG) )
  • Diebel,J. ( Institut fur Mikrotechnik Mainz GmbH (FRG) )
掲載資料名:
Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3223
発行年:
1997
開始ページ:
168
終了ページ:
175
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426550 [0819426555]
言語:
英語
請求記号:
P63600/3223
資料種別:
国際会議録

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