Strain effects in multilayers

Strain effects in multilayers

著者名:

Ashruf,C.M.A. ( Delft Univ.of Technology (Netherlands) )
French,P.J. ( Delft Univ.of Technology (Netherlands) )
de Boer,C. ( Delft Univ.of Technology (Netherlands) )
Sarro,P.M. ( Deilt Univ.of Technology (Netherlands) )

掲載資料名:

Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3223

発行年:

1997

開始ページ:

149

終了ページ:

159

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426550 [0819426555]

言語:

英語

請求記号:

P63600/3223

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017865
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Micromachining and Microfabrication Process Technology
回次:	1997 : 3rd
会議開催地:	Austin, TX, USA
会議開催年:	1997.09.29-1997.09.30

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