Optical applications of silicon micromachining technology (Invited Paper)

Optical applications of silicon micromachining technology (Invited Paper)

著者名:

Trott,C.R. ( Hewlett-Packard Co. )
Yang,L. ( Hewlett-Packard Co. )
Carey,K. ( Hewlett-Packard Co. )
Ratowsky,R.P. ( Lawrence Livermore National Lab. )
Kallman,J.S. ( Lawrence Livermore National Lab. )

掲載資料名:

Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3223

発行年:

1997

開始ページ:

120

終了ページ:

129

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426550 [0819426555]

言語:

英語

請求記号:

P63600/3223

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017865
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Micromachining and Microfabrication Process Technology
回次:	1997 : 3rd
会議開催地:	Austin, TX, USA
会議開催年:	1997.09.29-1997.09.30

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