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New developments of process technologies for microfabrication

著者名:
  • Piotter,V. ( Forschungszentrum Karlsruhe GmbH (FRG) )
  • Hanemann,T. ( Forschungszentrum Karlsruhe GmbH (FRG) )
  • Ruprecht,R. ( Forschungszentrum Karlsruhe GmbH (FRG) )
  • Thies,A. ( Forschungszentrum Karlsruhe GmbH (FRG) )
  • HouBelt,J.H. ( Forschungszentrum Karlsruhe GmbH (FRG) )
掲載資料名:
Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3223
発行年:
1997
開始ページ:
91
終了ページ:
99
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426550 [0819426555]
言語:
英語
請求記号:
P63600/3223
資料種別:
国際会議録

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