Characteristics of a high-resolution displacement sensor using mode interference in the optical waveguide

Characteristics of a high-resolution displacement sensor using mode interference in the optical waveguide

著者名:

Iwasaki,Y. ( Nikon Corp. (Japan) )
Doi,M. ( Nikon Corp. (Japan) )
Shionoya,T. ( Nikon Corp. (Japan) )
Okamoto,K. ( Nikon Corp. (Japan) )

掲載資料名:

Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3275

発行年:

1998

開始ページ:

57

終了ページ:

64

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819427144 [0819427144]

言語:

英語

請求記号:

P63600/3275

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017860
シリーズID:	PA00000029
会議名:	Photonics West : Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays
回次:	1998 : 2nd
会議開催地:	San Jose, CA, USA
会議開催年:	1998.01.29-1998.01.30

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