Blank Cover Image

New detailed CD measurement method by scanning confocal laser microscope

著者名:
掲載資料名:
Photomask and X-Ray Mask Technology V
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3412
発行年:
1998
開始ページ:
420
終了ページ:
428
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819428646 [0819428647]
言語:
英語
請求記号:
P63600/3412
資料種別:
国際会議録

類似資料:

1 国際会議録 Linearity improvement for CD metrology with deep UV microscope

Yamane, T., Hirano, T.

SPIE - The International Society of Optical Engineering
7 国際会議録 Assurance of CD for 45 nm half-pitch with immersion microscope [6283-112]

Yamane, T., Taniguchi, R., Hirano, T.

SPIE - The International Society of Optical Engineering
2 国際会議録 Characteristics of CD measurement equipment

Yamane,T., Hirano,T.

SPIE - The International Society for Optical Engineering
8 国際会議録 Advanced multifocus confocal laser scanning microscope for single molecule studies

Dertinger, T., Koberling, F., Benda, A., Erdmann, R., Hof, M., Enderlein, J.

SPIE - The International Society of Optical Engineering
3 国際会議録 CD measurement for next-generation mask

Yamane,T., Hirano,T.

SPIE-The International Society for Optical Engineering
9 国際会議録 A video rate laser scanning confocal microscope

H. Ma, J. Jiang, H. Ren, A. E. Cable

Society of Photo-optical Instrumentation Engineers
4 国際会議録 Ablation of hard tissue with the holmium laser investigated by a surface profile measurement system and a confocal laser scanning microscope

T.G. Barton, M. Christ, H.-J. Foth, K. Hörmann, N. Stasche

Society of Photo-optical Instrumentation Engineers
10 国際会議録 Fizeau confocal laser scanning interference microscope

Meilan,P.F., Caravaglia,M.

SPIE - The International Society for Optical Engineering
5 国際会議録 A New Confocal Scanning Laser MACROscope/Microscope Applied to the Characterization of Solar Cells

Ribes, A. C., Damaskinos, S., Tiedje, H. F., Dixon, A. E., Brodie, D. E., Duttagupta, S. P., Fauchet, P. M.

MRS - Materials Research Society
11 国際会議録 The laser-scanning confocal vibrometer microscope [5856-53]

Rembe, C., Drabenstedt, A.

SPIE - The International Society of Optical Engineering
6 国際会議録 Automatic analysis for neuron by confocal laser scanning microscope [6051-10]

Satou K., Aoki Y., Mataga N., Hensh T. K, Taki K.

SPIE - The International Society of Optical Engineering
12 国際会議録 Compact laser scanning confocal microscope [5858-08]

Beghuin, D., VandeVen, M., Ameloot, M., Claessens, D., Van Oostveldt, P.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12