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MOEM pressure and other physical sensors using photon tunneling and optical evanescent fields with exponential sensitivities and excellent stabilities

著者名:
掲載資料名:
Microelectronic Structures and MEMS for Optical Processing IV
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3513
発行年:
1998
開始ページ:
210
終了ページ:
222
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429728 [0819429724]
言語:
英語
請求記号:
P63600/3513
資料種別:
国際会議録

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