Blank Cover Image

Modeling and measurement of electrostatic micromirror array fabricated with single-layer polysil icon micromachining technology

著者名:
掲載資料名:
Microelectronic Structures and MEMS for Optical Processing IV
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3513
発行年:
1998
開始ページ:
59
終了ページ:
70
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429728 [0819429724]
言語:
英語
請求記号:
P63600/3513
資料種別:
国際会議録

類似資料:

1 国際会議録 Electrostatic micromirror fabricated using CMP and anodic bonding

Kim, K., Choi, W., Park, K., Park, J.-S., Park, H.-D., Heo, H.

SPIE - The International Society of Optical Engineering
7 国際会議録 Design and testing of polysilicon surface-micromachined piston micromirror arrays

Cowan,W.D., Bright,V.M., Lee,M.K., Comtois,J.H., Michalicek,M.A.

SPIE-The International Society for Optical Engineering
2 国際会議録 Fabrication of electromagnetic micromirror array

Jang,Y.-H., Kim,Y.-K.

SPIE-The International Society for Optical Engineering
8 国際会議録 Arrays of spherical micromirrors and molded microlenses fabricated with bulk Si micromachining

Vdovin, G.V., Akhzar-Mehr, O., Sarro, P.M., Monteiro, D.W.D.L., Loktev, M.Y.

SPIE-The International Society for Optical Engineering
3 国際会議録 LEAKAGE AND TRANSCONDUCTANCE IN POLYSIL ICON THIN FILM TRANSISTORS: EFFECT OF GRAIN BOUNDARY HYDROGENATION

Qian, F., Kim, D. M., Kawamoto, G. H.

Materials Research Society
9 国際会議録 One-axis metallic electrostatic micromirror array

K. Tondapu, Q. Cheng, M. Almasri

Society of Photo-optical Instrumentation Engineers
4 国際会議録 Single crystalline silicon micromirror array for maskless photolithography in protein synthesis systems

Jang, Y.-H., Lee, K.-N., Shin, D.-S., Lee, Y.-S., Kim, Y.-K.

SPIE - The International Society of Optical Engineering
10 国際会議録 Fabrication and deflection measurement of micromirrors supported by an S-shape girder

Kim,H., Kim,J.-K., Kim,Y.-K., Shin,H.-J.

SPIE - The International Society for Optical Engineering
5 国際会議録 Automatic test equipment for the micromirror array

Kim,H., Cho,K., Kim,Y.-K., Shin,J.-W., Shin,H.-J., Moon,J.-H.

SPIE-The International Society for Optical Engineering
11 国際会議録 Development of advanced second-generation micromirror devices fabricated in a four-level planarized surface-micromachined polycrystalline silicon process

Michalicek,M.A., Comtois,J.H., Schriner,H.K.

SPIE-The International Society for Optical Engineering
6 国際会議録 Design and fabrication of micromirror array with hidden joint structures

Ji,C.-H, Kim,Y.-K.

SPIE-The International Society for Optical Engineering
12 国際会議録 Micromachined, Electrostatically-Actuated Optical Attenuators/Switches Fabricated by Fusion Bonding of Single-Crystal, Ultra-Thin Silicon Wafers

Brown, R.A., Aksyuk, V.A., Farmer, K.R.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12