Novel Concepts and Technologies for Manufacturing Optical Microdevices (Invited Paper)
- 著者名:
- Ehrfeld,W. ( (Germany) )
- Bauer,H.-D. ( (Germany) )
- Drews,D. ( (Germany) )
- Lacher,M. ( (Germany) )
- 掲載資料名:
- OPTIKA '98, 14-17 September 1998, Budapest, Hungary
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3573
- 発行年:
- 1998
- 開始ページ:
- 442
- 終了ページ:
- 450
- 出版情報:
- Bellingham, WA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819430380 [0819430382]
- 言語:
- 英語
- 請求記号:
- P63600/3573
- 資料種別:
- 国際会議録
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