TEM investigation of the microstructure in laser-crystallized Ge films

TEM investigation of the microstructure in laser-crystallized Ge films

著者名:

Gale, Ronald P. ( Lincoln Laboratory )
Fan, John C.C. ( Lincoln Laboratory )
Chapman, Ralph L. ( Lincoln Laboratory )
Zeiger, Herbert J. ( Lincoln Laboratory )

掲載資料名:

Defects in semiconductors : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposia proceedings

シリーズ巻号:

2

発行年:

1981

開始ページ:

439

終了ページ:

444

出版情報:

New York: North Holland

ISSN:

02729172

ISBN:

9780444005960 [044400596X]

言語:

英語

請求記号:

M23500/2

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017841
シリーズID:	PA00000010
会議名:	Materials Research Society Annual Meeting ; Symposium on defects in semiconductors
回次:	1980
会議開催地:	Boston, MA, USA
会議開催年:	1980.11.16-1980.11.20

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