Micromachined silicon actuators with low driving voltage and high accuracy for optical switches and tunable filters
- 著者名:
- 掲載資料名:
- Silicon-based optoelectronics II : 28 January 2000, San Jose, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3953
- 発行年:
- 2000
- 開始ページ:
- 134
- 終了ページ:
- 141
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819435705 [0819435708]
- 言語:
- 英語
- 請求記号:
- P63600/3953
- 資料種別:
- 国際会議録
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