Design of a hybrid silicon fiber optic pressure sensor array for tactile sensing

Design of a hybrid silicon fiber optic pressure sensor array for tactile sensing

著者名:

掲載資料名:

Indo-Russian Workshop on Micromechanical Systems : 2-4 February 1999, New Delhi, India

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3903

発行年:

1999

開始ページ:

216

終了ページ:

222

出版情報:

Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819435132 [0819435139]

言語:

英語

請求記号:

P63600/3903

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017635
シリーズID:	PA00000029
会議名:	Indo-Russian Workshop on Micromechanical Systems
回次:	1999
会議開催地:	New Delhi, India
会議開催年:	1999.02.02-1999.02.04

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