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TRIZ in MEMS

著者名:
Apte,P.R. ( Tata Institute of Fundamental Research )  
掲載資料名:
Indo-Russian Workshop on Micromechanical Systems : 2-4 February 1999, New Delhi, India
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3903
発行年:
1999
開始ページ:
42
終了ページ:
47
出版情報:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819435132 [0819435139]
言語:
英語
請求記号:
P63600/3903
資料種別:
国際会議録

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