Integration of MEMS devices
- 著者名:
- French,P.J. ( Delft Univ.of Technology )
- 掲載資料名:
- Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3893
- 発行年:
- 1999
- 開始ページ:
- 59
- 終了ページ:
- 68
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434944 [0819434949]
- 言語:
- 英語
- 請求記号:
- P63600/3893
- 資料種別:
- 国際会議録
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