Influence of IMP copper flash layer on the properties of copper films deposited by metal organic chemical vapor deposition
- 著者名:
Li,C.Y. ( Institute of Microelectronics ) Zhang,D.H. Qian,Y. Narayanan,B. Wu,J.J. Yu,B. Jiang,Z.X. Foo,P.D. Xie,J. Zhang,Q. Yoon,S.F. - 掲載資料名:
- Multilevel Interconnect Technology III
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3883
- 発行年:
- 1999
- 開始ページ:
- 46
- 終了ページ:
- 49
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434807 [0819434809]
- 言語:
- 英語
- 請求記号:
- P63600/3883
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
Materials Research Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Materials Research Society |
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MRS - Materials Research Society |
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SPIE - The International Society of Optical Engineering |