Blank Cover Image

Influence of IMP copper flash layer on the properties of copper films deposited by metal organic chemical vapor deposition

著者名:
Li,C.Y. ( Institute of Microelectronics )
Zhang,D.H.
Qian,Y.
Narayanan,B.
Wu,J.J.
Yu,B.
Jiang,Z.X.
Foo,P.D.
Xie,J.
Zhang,Q.
Yoon,S.F.
さらに 6 件
掲載資料名:
Multilevel Interconnect Technology III
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3883
発行年:
1999
開始ページ:
46
終了ページ:
49
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434807 [0819434809]
言語:
英語
請求記号:
P63600/3883
資料種別:
国際会議録

類似資料:

Narayanan,B., Li,C.Y., Lee,K., Yu,B., Wu,J.J., Foo,P.D., Xie,J.

SPIE - The International Society for Optical Engineering

Loh,S.W., Zhang,D.H., Li,C.Y., Liu,R., Wee,A.T.S.

SPIE-The International Society for Optical Engineering

Loh, S.W., Zhang, D.H., Li, C.Y., Liu, R., Wee, A.T.S., Foo, P.D., Xie, Joseph, Prasad, K., Tan, C.M., Lee, Y.K.

Electrochemical Society

Shin, H. -K., Hampden-Smith, M. J., Kodas, T. T., Duesler, E.. N., Farr, J. D., Paffett, M.

Materials Research Society

Liu, H., Wang, S.R., He, L., Zhang, Y., Li, W.H., Wu, J.J., Qian, Y., Li, C.Y., Koh, L.T., Liu, Y.J., Xie, J.

Electrochemical Society

Zhao, S.P., Koh, L.T., Zhang, D.H., Loh, S.A., Liew, G.M., Li, C.Y., Woo, Y.K., Cheng, C.K., Foo, P.D.

Electrochemical Society

Zhang, Y., Koh, L.T., Li, C.Y., Liu, H., You, G.Z, Wu, J.J., Xie, J.

Electrochemical Society

Zhang, J.-Z., Golz, J.W., Johnson, D.L., McAvoy, D.T., Halpern, B.L., Schmitt, J.J.

Materials Research Society

Yang, D.J., Zhang, Qing, Yoon, S.F., Ahn, J., Wang, S.G., Wang, Q.

Materials Research Society

Yoon, Kyoung-Ryul, Kim, Seok, Choi, Doo-Jin, Kim, Ki-Hwan, Koh, Seok-Keun

MRS - Materials Research Society

Huelsman, A. D., Yoon, E., Reif, R.

Materials Research Society

Zhang, Q., Yang, D.J., Wang, S.G., Yoon, S.F., Ahn, J.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12