TiSi-nitride-based attenuated phase-shift mask for ArF Lithography
- 著者名:
Koo,S.-S. ( Hyundai Electronics Industries Co.Ltd. ) Hur,I.-B. Koo,Y.-M. Baik,K.-H. Choi,I.-H. Kim,L.-J. Park,K.-T. Shin,C. - 掲載資料名:
- 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3873
- 発行年:
- 1999
- 巻:
- Part2
- 開始ページ:
- 969
- 終了ページ:
- 978
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780849434686 [084943468X]
- 言語:
- 英語
- 請求記号:
- P63600/3873
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
7
国際会議録
Study of optical proximity effects using off-axis illumination with attenuated phase shift mask
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
4
国際会議録
Comparative study of chromeless and attenuated phase shift mask for 0.3-k1 ArF lithography of DRAM
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
5
国際会議録
Sub-120-nm technology compatibility of attenuated phase-shift mask in KrF and ArF lithography
SPIE-The International Society for Optical Engineering |
11
国際会議録
Impact of ArF attenuated PSM using multishifter layer (TiN/Si3N4) for next-generation lithography
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |