High-resolution DUV inspection system for 150-nm generation masks
- 著者名:
Tabata,M. ( Toshiba Corp. ) Tsuchiya,H. Sanada,Y. Nishizaka,T. Hirazawa,H. Kobayashi,N. Nagai,H. Watanabe,T. Oohashi,K. Inoue,H. Nomura,T. Ono,A. - 掲載資料名:
- 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3873
- 発行年:
- 1999
- 巻:
- Part1
- 開始ページ:
- 138
- 終了ページ:
- 146
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780849434686 [084943468X]
- 言語:
- 英語
- 請求記号:
- P63600/3873
- 資料種別:
- 国際会議録
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