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Interferometry method for measuring head-disk spacing down to contact

著者名:
掲載資料名:
Optical engineering for sensing and nanotechnology (ICOSN '99) : 16-18 June 1999, Yokohama, Japan
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3740
発行年:
1999
開始ページ:
598
終了ページ:
601
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819432148 [0819432148]
言語:
英語
請求記号:
P63600/3740
資料種別:
国際会議録

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