Laser direct dry etching of GaAs/AlGaAs multilayer

Laser direct dry etching of GaAs/AlGaAs multilayer

著者名:

Park,S.-K. ( Inha Univ. )
Lee,C.
Kim,E.-K.

掲載資料名:

Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3618

発行年:

1999

開始ページ:

370

終了ページ:

377

出版情報:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819430885 [0819430889]

言語:

英語

請求記号:

P63600/3618

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017609
シリーズID:	PA00000029
会議名:	Photonics West : Laser Applications in Microelectronic and Optoelectronic Manufacturing
回次:	1999 : 4th
会議開催地:	San Jose, CA, USA
会議開催年:	1999.01.25-1999.01.27

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