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Lattice strain in excimer-laser-crystallized poly-Si thin films

著者名:
掲載資料名:
Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3618
発行年:
1999
開始ページ:
320
終了ページ:
327
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430885 [0819430889]
言語:
英語
請求記号:
P63600/3618
資料種別:
国際会議録

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