NEW ALGORITHMS FOR RAPID FULL-WAFER MAPPING BY HIGH RESOLUTION DOUBLE AXIS X-RAY DIFFRACTION

NEW ALGORITHMS FOR RAPID FULL-WAFER MAPPING BY HIGH RESOLUTION DOUBLE AXIS X-RAY DIFFRACTION

著者名:

Loxley, N.

掲載資料名:

Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

324

発行年:

1994

開始ページ:

451

出版情報:

Pittsburgh: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992238 [1558992235]

言語:

英語

請求記号:

M23500/324

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017537
シリーズID:	PA00000011
会議名:	Symposium on diagnostic techniques for semiconductor materials processing
回次:	1993
会議開催地:	Boston, MA, USA
会議開催年:	1993.11.29-1993.12.02

類似資料:

1 国際会議録 Combined Room Temperature Photoluminescence and High Resolution X-ray Diffraction Mapping of Semiconductor Wafers Cockerton, S., Cooke, M. L., Bowen, D. K., Tanner, B. K. MRS - Materials Research Society	7 国際会議録 X-RAY DOUBLE CRYSTAL TOPOGRAPHY OF PROCESSED SILICON WAFERS Loxley, Neil, Tanner, Brian K. Materials Research Society
2 国際会議録 A GRAZING INCIDENCE X-RAY REFLECTOMETER FOR RAPID NONDESTRUCTIVE CHARACTERIZATION OF THIN FILMS AND INTERFACES Loxley, N., Monteiro, A., Cooke, M. L.., Bowen, D. K., Tanner, B. K. Materials Research Society	8 国際会議録 THE PERFORMANCE OF CHANNEL CUT COLLIMATORS FOR PRECISION X-RAY DIFFRACTION STUDIES OF EPITAXIAL LAYERS Loxley, Neil, Keith Bowen, D., Tanner, Brian K. Materials Research Society
3 国際会議録 High-Resolution X-ray Diffraction from Epitaxial Gallium Nitride Films Lafford, T., Loxley, N., Tanner, B. K. MRS - Materials Research Society	9 国際会議録 A NEW TECHNIQUE FOR HIGH SPEED X-RAY DOUBLE CRYSTAL ROCKING CURVE ANALYSIS Tanner, B.K., Xi, C., Bowen, D.K. Materials Research Society
4 国際会議録 PRINCIPLES AND PERFORMANCE OF A PC-BASED PROGRAM FOR SIMULATION OF DOUBLE-AXIS X-RAY ROCKING CURVES OF THIN EPITAXIAL FILMS Keith Bowen, D., Loxley, Neil, Tanner, Brian K., Cooke, Lynne, Capano, Michael A. Materials Research Society	10 国際会議録 CHARACTERIZATION OF SUB-SURFACE STRUCTURES BY DOUBLE CRYSTAL X-RAY DIFFRACTION Bowen, D. K., Hill, M. J., Tanner, B. K. Materials Research Society
5 国際会議録 APPLICATION OF A DESK-SIDE DOUBLE-AXIS X-RAY DIFFRACTOMETER FOR VERY LARGE AREA EPILAYER CHARACTERIZATION Loxley, Neil, Keith Bowen, D., Tanner, Brian K. Materials Research Society	11 国際会議録 HIGH RESOLUTION X-RAY DIFFRACTION OF Hg1-XMnXTe EPITAXIAL FILMS Tanner, B.K., Hallam, T.D., Funaki, M., Brinkman, A.W. Materials Research Society
6 国際会議録 DOUBLE CRYSTAL SYNCHROTRON X-RAY DIFFRACTION STUDY OF STOICHIOMETRY IN GALLIUM ARSENIDE Cockerton, S., Green G.S., Tanner, B.K. Materials Research Society	12 国際会議録 X-RAY REFLECTOMETRY FROM SEMICONDUCTOR SURFACES AND INTERFACES Tanner, Brian K., Miles, Simon J., Keith Bowen, D., Hart, Linda, Loxley, Neil Materials Research Society

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