REAL-TIME MONITORING AND CONTROL OF SILICON EPITAXY USING EMISSION FOURIER TRANSFORM INFRARED SPECTROSCOPY

REAL-TIME MONITORING AND CONTROL OF SILICON EPITAXY USING EMISSION FOURIER TRANSFORM INFRARED SPECTROSCOPY

著者名:

掲載資料名:

Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

324

発行年:

1994

開始ページ:

365

出版情報:

Pittsburgh: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992238 [1558992235]

言語:

英語

請求記号:

M23500/324

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017537
シリーズID:	PA00000011
会議名:	Symposium on diagnostic techniques for semiconductor materials processing
回次:	1993
会議開催地:	Boston, MA, USA
会議開催年:	1993.11.29-1993.12.02

類似資料:

1 国際会議録 Real Time Monitoring of Silicon Surface Cleaning Using H2 and NH3 Plasmas Zhou, Z-H, Aydil, E.S., Gottscho, R.A., Chabal, Y.J., Reif, R. Electrochemical Society	7 国際会議録 Monitoring of CO flare emissions using open-path Fourier transform infrared technology Zwicker,J.O., Ringler,E., Kagann,R.H. SPIE - The International Society for Optical Engineering
2 国際会議録 Time-resolved air monitoring using Fourier transform infrared spectroscopy Biermann, Heinz W. American Chemical Society	8 国際会議録 STRUCTURAL DEFECTS OF SILICON EPITAXY AND EPI/SUBSTRATE INTERFACE RELATED TO IMPROPER IN-SITU SURFACE CLEANING AT LOW TEMPERATURES Yew, Tri-Rung, Reif, Rafael Materials Research Society
3 国際会議録 Real Time Intrusive Optical Emission Spectroscopy for Process Control Lee, P-W., Kim, Y-J., Seo, S.H., Kim, J-H., Chang, H-Y. Electrochemical Society	9 国際会議録 (424g) Real Time PAT Monitoring of Bioreactor Mab IgG3 Cell Culture Process Dynamics Via Fourier Transform Infrared Spectroscopy: Implications and Challenges Huiquan Wu American Institute of Chemical Engineers
4 国際会議録 Process monitoring and control of integrated-circuit manufacturing using Fourier transform infrared spectroscopy S. Liu, J.R. Haigis, M.B. DiTaranto, K. Kinsella, J.R. Markham Society of Photo-optical Instrumentation Engineers	10 国際会議録 (424g) Real Time PAT Monitoring of Bioreactor Mab IgG3 Cell Culture Process Dynamics Via Fourier Transform Infrared Spectroscopy: Implications and Challenges Huiquan Wu American Institute of Chemical Engineers
5 国際会議録 Characterization of Silicon Carbide Nanowhiskers Synthesized by Microwave Heating Using Photoluminescence Spectroscopy and Fourier Transform Infrared … S.M. Kahar, C.H. Voon, C.C. Lee, K.L. Foo, B.Y. Lim Trans Tech Publications	11 国際会議録 Investigation of Gas-Phase Reaction Effective on Deposition Behavior in MOCVD- Pb(Zr,Ti)O3 Film Using In-Situ-Monitored by Fourier Transform Infrared … Asano, G., Satake, T., Obtsuki, K., Funakubo, H. Electrochemical Society
6 国際会議録 Investigation of thin films using Fourier-transform infrared emission spectroscopy Terpugov,E.L., Degtyareva,O.V. SPIE - The International Society for Optical Engineering	12 国際会議録 In Situ Fourier Transform Infrared Spectroscopy for Real-Time Diagnostics of Thin-Film Processes Solomon, P. R., Charpenay, S., Zhang, W., Bonanno, A. S., Rosenthal, P. A., Cosgrove, J. E., Kinsella, K. K., Kung, P. … MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12