Blank Cover Image

Characterization of Low-Temperature PECVD Silicon Dioxide Films

著者名:
Deenapanray, P. N. K.
Lengyel, J.
Tan, H. H.
Petravic, M.
Durandet, A.
Williams, J. S.
Jagadish, C.
さらに 2 件
掲載資料名:
Properties and processing of vapor-deposited coatings : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
555
発行年:
1999
開始ページ:
197
出版情報:
Warrendale, PA.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994614 [1558994610]
言語:
英語
請求記号:
M23500/555
資料種別:
国際会議録

類似資料:

1 国際会議録 Low Energy Ion Irradiation of Silicon: Compound Formation and Segregation of Impurities

Petravic, M., Williams, J.S., Deenapanray, P.N.K.

Electrochemical Society
7 国際会議録 Application of Quantum Well Intermixing for Optoelectronic Device Integration

Deenapanray, P.N.K., Fu, L., Tan, H.H., Cohen, M.I., Yuan, S., Li, G., Gal, M., Jagadish, C.

SPIE-The International Society for Optical Engineering
2 国際会議録 *Influence of SiOx capping layer quality on impurity-free interdiffusion in GaAs/AlGaAs quantum wells

Deenapanray, P. N. K., Tan, H. H., Jagadish, C.

MRS-Materials Research Society
8 国際会議録 The use of micro-raman spectroscopy to monitor high-pressure high-temperature annealing of ion-implanted GaN films

Kuball, M., Mayes, J. M., Suski, T., Jun, J., Tan, H. H., Williams, J. S., Jagadish, C.

MRS-Materials Research Society
3 国際会議録 Electrical Isolation of p-Type GaAsN Epitaxial Layers by Ion Irradiation

Gao, Q., Muller, J., Deenapanray, P.N.K., Tan, H.H., Jagadish, C.

Materials Research Society
9 国際会議録 Implant Isolation of ZnO Epitaxial Layers

Kucheyev, S.O., Jagadish, C., Williams, J.S., Deenapanray, P.N.K., Yano, Mitsuaki, Koike, Kazuto, Sasa, Shigehiko, …

Materials Research Society
4 国際会議録 Low Temperature Bonding of PECVD Silicon Dioxide Layers

P.T. Baine, M. Bain, D.W. McNeill, H.S. Gamble, M. Armstrong

Electrochemical Society
10 国際会議録 A DLTS Investigation on the Effect of Ion Mass, Fluence and Energy on the Introduction of a Higher-Order Vacancy Cluster in Noble Gas Ion Bombarded n-Si

Deenapanray, P. N. K., Williams, J. S.

MRS - Materials Research Society
5 国際会議録 Defect Engineering and Atomic Relocation Processes in Impurity-Free Disordered GaAs and AlGaAs

Deenapanray, P.N.K., Krispin, M., Meyer, W.E., Tan, H.H., Jagadish, C., Auret, F.D.

Materials Research Society
11 国際会議録 Irradiation-Induced Damage and Intermixing of GaAs-AlGaAs Quantum Wells

Tan, H. H., Williams, J. S., Jagadish, C., Burke, P. T., Gal, M.

MRS - Materials Research Society
6 国際会議録 Impurity Free Intermixing for Optoelectronic Device Integration

Buda, M., Fu, L., Hay, J., Deenapanray, P.N.K., Tan, H.H., Jagadish, C., Reece, P., Gal, M.

Electrochemical Society
12 国際会議録 Determination of residual stress in low-temperature PECVD silicon nitride thin films

Martyniuk, M.P., Antoszewski, J., Musca, C.A., Dell, J.M., Faraone, L.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12