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Surface-Particle Interactions in the Chemical Mechanical Polishing Process

著者名:
掲載資料名:
Surface-controlled nanoscale materials for high-added-value applications : symposium held November 30-December 3, 1997, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
501
発行年:
1998
開始ページ:
387
出版情報:
Warrendale, Penn: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994065 [1558994068]
言語:
英語
請求記号:
M23500/501
資料種別:
国際会議録

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