Film Crystallographic Texture and Substrate Surface Roughness in Layered Aluminum Metallization
- 著者名:
Rodbell, K. P. Svilan, V. Gignac, L. M. DeHaven, P. W. Murphy, R. J. Licata, T. J. - 掲載資料名:
- Materials reliability in microelectronics VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 428
- 発行年:
- 1996
- 開始ページ:
- 261
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993310 [1558993312]
- 言語:
- 英語
- 請求記号:
- M23500/428
- 資料種別:
- 国際会議録
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