Structural and Electrical Characterization of FeSix-Layers (1。蛉。?) Prepared by RTP of Fe Layers Sputtered on Si (100)
- 著者名:
Libezny, M. Poortmans, J. Amesz, P. H. Donaton, R. A. Larsen, K. Kyllesbech Vandenabeele, P. Jonckx, F. Maex, K. Nijs, J. - 掲載資料名:
- Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 387
- 発行年:
- 1995
- 開始ページ:
- 389
- 出版情報:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992900 [1558992901]
- 言語:
- 英語
- 請求記号:
- M23500/387
- 資料種別:
- 国際会議録
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