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Mercury-contact switching with gap-closing microcantilever

著者名:
掲載資料名:
Micromachined devices and components II : 14-15 October 1996, Austin, Texas
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2882
発行年:
1996
開始ページ:
204
終了ページ:
209
出版情報:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422804 [0819422800]
言語:
英語
請求記号:
P63600/2882
資料種別:
国際会議録

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