New developments in the integration of micromachined sensors

New developments in the integration of micromachined sensors

著者名:

Sarro,P.M. ( Delft Univ.of Technology )
French,P.J.
Gennissen,P.T.J.

掲載資料名:

Micromachined devices and components II : 14-15 October 1996, Austin, Texas

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2882

発行年:

1996

開始ページ:

26

終了ページ:

36

出版情報:

Bellingham, WA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819422804 [0819422800]

言語:

英語

請求記号:

P63600/2882

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017495
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Micromachined Devices and Components
回次:	1996 : 2nd
会議開催地:	Austin, TX, USA
会議開催年:	1996.10.14-1996.10.15

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